- Version
- Download 31
- File Size 530.16 KB
- File Count 1
- Create Date August 25, 2016
- Last Updated January 19, 2022
Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges.
Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges.