Identification of volatile products in low pressure hydrocarbon electron resonance reactive ion etching of InP and GaAs.

Aug 25, 2016

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Identification of volatile products in low pressure hydrocarbon electron resonance reactive ion etching of InP and GaAs.

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Identification of volatile products in low pressure hydrocarbon electron resonance reactive ion etching of InP and GaAs.

Identification of volatile products in low pressure hydrocarbon electron resonance reactive ion etching of InP and GaAs.

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