Influence of plasma radial nonuniformities on the properties of RF magnetron sputtered indium tin oxide (ITO) films

Jan 9, 2026

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Influence of plasma radial nonuniformities on the properties of RF magnetron sputtered indium tin oxide (ITO) films

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Influence of plasma radial nonuniformities on the properties of RF magnetron sputtered indium tin oxide (ITO) films

Influence of plasma radial nonuniformities on the properties of RF magnetron sputtered indium tin oxide (ITO) films

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