Investigation of SrBi2Ta2O9 thin films etching mechanisms in Cl2/Ar plasma.

Aug 25, 2016

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Investigation of SrBi2Ta2O9 thin films etching mechanisms in Cl2/Ar plasma.

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Investigation of SrBi2Ta2O9 thin films etching mechanisms in Cl2/Ar plasma.

Investigation of SrBi2Ta2O9 thin films etching mechanisms in Cl2/Ar plasma.

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