Mass Spectrometer System for UHV Thermal Desorption Studies


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Create Date5th October 2016
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The Hiden TPD Workstation provides a versatile platform for precisely controlled thermal desorption studies (TDS) in the UHV pressure regime through a temperature range from 50oC to 1000oC. Common applications include desorption studies of silicon wafers and thin-film coatings, quantification of hydrogen evolution from metals.