Mass Spectrometer System for UHV Thermal Desorption Studies

Oct 5, 2016

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Mass Spectrometer System for UHV Thermal Desorption Studies

The Hiden TPD Workstation provides a versatile platform for precisely controlled thermal desorption studies (TDS) in the UHV pressure regime through a temperature range from 50^oC to 1000^oC. Common applications include desorption studies of silicon wafers and thin-film coatings, quantification of hydrogen evolution from metals.

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Mass Spectrometer System for UHV Thermal Desorption Studies

Mass Spectrometer System for UHV Thermal Desorption Studies

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