|File Size||523.00 KB|
|Create Date||4th October 2016|
Hiden is pleased to announce the launch of the Compact SIMS, a design breakthrough for surface analysis, at Vacuum Expo 2014, 15th & 16th October Ricoh Arena, Coventry UK. Visit us on Booth V10. The Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis.