Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets

Jan 10, 2022

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Create Date January 10, 2022
Last Updated January 19, 2022

Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets

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Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets

Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets

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