Dual Polarity SIMS Workstation
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A uniquely powerful surface analysis system
Hiden Analytical has developed the Dual Polarity SIMS system, the only SIMS system that collects positive and negative secondary ions at the same time—capturing the full chemical picture in a single analysis. No need to choose between polarities or risking missed data on unique, one-off samples.
With dual opposing EQS spectrometers and enhanced collection efficiency, it delivers faster, more accurate results across a wide range of materials. The result is complete, high-quality data from every sample.
Applications
Conventionally, SIMS analysis collects either positive or negative secondary ions as different materials preferentially emitting ions of a particular polarity. For instance, calcium is mostly ejected as a positive ion and gold as a negative ion. Thus, to fully characterise a sample two separate analyses are required. In the case of large planar samples, like silicon wafers, the material is extremely reproducible and so positive and negative secondary ion analyses can be overlaid with relative ease, however, in the case of a solitary particle that will be consumed by the ion beam, the analyst has to decide which polarity to collect – there is no second chance.
To overcome this dilemma, and also to overcome issues with accurate registration of features, the Hiden Dual Polarity SIMS Workstation is unique in its ability to detect both positive and negative secondary ions simultaneously. This is achieved by positioning two EQS SIMS spectrometers opposite one another on the standard SIMS Workstation chamber. One EQS collects positive ions and the other negative ions, with the additional advantage that the matched electric fields actually amplify the collection efficiency.
The dual polarity SIMS mode can be used with any of the ion guns, with argon primary ions, oxide materials and higher concentration devices such as solar cells are easily analysed. In the case of oxygen primary ions dopant and matrix species are efficiently detected. When the Cs ion gun is used the very powerful CsM+ analysis method is further enhanced with the ability to detect both electronegative dopants and impurities at the same time as quantitative analysis of the matrix elements and atomic positive ions.
Advantages of Dual Polarity Detection
- No need to choose positive OR negative ion collection
- Very efficient use of sputtered material -only one analysis not two (faster)
- Overcomes problems of accurate registration of overlaid depth profiles and images
- Characterisation of inhomogeneous samples where there is “only one shot.”
- Enhances CsM+ analysis by permitting positive ion and negative atomic ion collection at the same time as CsM+ ions to give a very complete view of the specimen.
The SIMS Mapper software provides a simple, but powerful, user interface to the SIMS tool. The species to be analysed are chosen from a period table view, with mass interferences highlighted, and the data are collected as images throughout the analysis. For depth profiles the gated area can be defined after analysis and images may be stacked to reconstruct the concentration profile in three dimensions. For less experienced operators, or in a production environment, analyses can be run from previously stored templates and fully automated “queued” running is possible with the automatic stage option. A range of data export formats allows results to be used by other software packages for enhanced display or processing.
- 3D imaging
- depth profiling with highly flexible gating
- simple choice of species
- easy set-up for inexperienced users yet full control for experts
- large live interactive image and depth profile windows
- export in .csv and proprietary formats
