EP-Replayer

The Hiden EP-Replayer is an essential tool for IMP-EPD users, enabling precise playback of previous etch data to fine-tune and optimise End Point detection recipes. By defining variables in the algorithmic recipe template, users can replay recorded data in real time, visualising the expected End Point for given parameters.

Just like live data acquisition, the Events Log tracks timestamps, state changes, and key count rates, while the Chart Marker graph displays the End Point progression. This allows users to test and refine different End Point detection methods and leverage advanced recipe template features—all with minimal wafer consumption. This builds a more robust, repeatable, and cost-effective etch process.

Designed for effortless integration with HAL10 IMP-EPD installations, the EP-Replayer simplifies the conversion of MASsoft data into replay-compatible files. Users can easily adjust End Point recipes through MASsoft, optimising detection accuracy and process efficiency.

Optionally the EP-Replayer can be operated independently from the etch tool, ensuring uninterrupted workflow efficiency. This flexibility allows users to refine their recipes without disrupting live processes—enhancing both convenience and productivity.

Presentations

IMP EPD – End Point Detector An overview of the Hiden Analytical SIMS end point detector system for ion beam etch applications

• IMP-EPD
• EQS
• PSM