Training course on SIMS

Professor Suleyman Ozcelik and PhD student Nihan Akin from Gazi University, Ankara, Turkey, recently visited Hiden for a two-week advanced training course on SIMS to compliment the high specification Hiden SIMS Workstation delivered to them last year.

Using positive and negative secondary ions, caesium molecular detection and sputtered neutral mass spectrometry, with primary ion energies as low as 1keV, it was possible to determine doping and matrix element composition with high depth resolution in solar cell, III-V and sensor samples, including packaged devices.

They were also shown the latest 3 dimensional SIMS imaging software which is ideal for obtaining depth profiles on patterned devices.

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