Mass spectrometers for vacuum, gas, plasma and surface science

Products

Mass spectrometers for gas analysis

Real time gas analysers that address the broadest application range

Gas analysis products

QGA

Quantitative gas analyser

HPR-20 QIC R&D

Specialist gas analysis system for advanced research

HPR-20 QIC R&D Plus

System with integrated gas control calibration unit

HPR-20 QIC EGA

Gas analysis system for evolved gas analysis in TGA-MS

TGA-MS

Mass spectrometer inlets for connecting/coupling to TGA systems

HPR-20 QIC TMS

Transient mass spectrometer for fast event gas analysis

QIC Biostream

Multi-stream gas/vapour analyser for fermentation off-gas analysis

HPR-40 DSA

Membrane inlet mass spectrometer for dissolved species analysis

HPR-60 MBMS

Molecular beam sampling mass spectrometer for ion and radical analysis

HPR-70

Batch inlet gas analysis system for discrete low volume sample analysis

HPR-90

Automated package cracking analysis system for light bulb gas analysis

 

Mass spectrometers for catalysis and thermal analysis

Automated micro reactors and mass spectrometers for catalyst researchers

View mass spectrometers for catalysis and thermal analysis

CATLAB-PCS

Automated microreactor/mass spectrometer system

SpaciMS

Spatially resolved capillary inlet mass spectrometer

HPR-20 QIC TMS

Transient mass spectrometer for fast event studies

TGA-MS

Mass spectrometer inlets for connecting/coupling to TGA systems

3F-PIC

Transient mass spectrometer for fast event UHV studies

HPR-60 MBMS

Molecular beam sampling mass spectrometer for ion and radical analysis

   
   

 

Mass spectrometers for thin films, plasma and surface engineering

RGA, plasma ion analysis, surface analysis and SIMS end point detection

Thin films, plasma and surface engineering

HPR-30

Process and residual gas analysis

EQP

Analysis of positive and negative ions, neutrals, and radicals

PSM

Plasma sampling mass spectrometer

ESPion

Langmuir probe for measurement of plasma properties

IMP-EPD

For ion etch control and optimum process quality

XBS

MBE deposition flux rate monitor

TPD Workstation

For UHV temperature programmed desorption studies

SIMS Workstation

UHV SIMS instrument for thin film surface analysis, static SIMS, depth profiling, and imaging

Compact SIMS

Compact SIMS instrument optimised for depth profiling at the nanometer scale

EQS SIMS Analyser

Bolt-on SIMS analyser for the analysis of secondary +ve and -ve ions from solid samples

MAXIM

SIMS/SNMS analyser for static and dynamic SIMS and SNMS

IG5C

A 5KeV Caesium SIMS primary  ion source for UHV surface analysis

IG20

A 5KeV Argon or Oxygen SIMS primary  ion source for UHV surface analysis

 

Mass spectrometers for residual gas analysis

Analysis of gas and vapour species in vacuum chambers and processes

Mass spectrometers for residual gas analysis

RGA Series

For the examination of components present in a vessel or evolved from a process

Ion Source Options

A range of electron impact ion sources that can be supplied with any of our RGAs

HMT

A dual mode RGA system for vacuum diagnostics and process monitoring 

HAL 201 RC

A Residual Gas Analyser configured for demanding UHV applications

HALO 201 MBE

For molecular beam epitaxy applications

XBS

An MBE deposition flux rate monitor

qRGA

For tokamak/torus fusion research

3F Series 1000/2000 RGA

For high precision scientific and process applications

3F-PIC

Transient mass spectrometer for fast event UHV studies

EPIC

A system for UHV analysis of neutrals, radicals and ions

IDP

A system for analysis of ions, neutrals and radicals in UHV desorption studies