Mass spectrometers for gas analysis
Real time gas analysers that address the broadest application range
| QGA | Quantitative gas analyser |
| Compact Gas Analysers | For less demanding applications |
| HPR-20 R&D | Specialist gas analysis system for advanced research |
| HPR-20 EGA | Gas analysis system for evolved gas analysis in TGA-MS |
| HPR-20 TMS | Transient mass spectrometer for fast event gas analysis |
| HPR-20 DLS | For ultra-high resolution & sensitivity analysis of hydrogen isotopes and light gases |
| HPR-20 EPIC | With electron impact / electron attachment ionization modes |
| HPR-20 S1000 | With 1000 amu mass range |
| QIC BioStream | Multi-stream gas/vapour analyser for fermentation off-gas analysis |
| QIC MultiStream | Integrated MS and selector valve for multi-component, multi-stream gas analysis |
| HPR-40 DSA | Membrane inlet mass spectrometer for dissolved species analysis |
| HPR-40 DEMS | Solutions for dissolved gas analysis and off-gas analysis in electrochemistry |
| HPR-60 MBMS | Molecular beam sampling mass spectrometer for ion and radical analysis |
| HPR-70 | Batch inlet gas analysis system for discrete low volume sample analysis |
| HPR-90 | Automated package cracking analysis system for light bulb gas analysis |
| QIC Series Inlets | Hiden offer a variety of inlet options for the QIC Series gas analysis systems |
Mass spectrometers for catalysis and thermal analysis
Automated micro reactors and mass spectrometers for catalyst researchers
| CATLAB-PCS | Automated microreactor/mass spectrometer system |
| CATLAB-FB | Horizontal Furnace/MS System for Catalyst Core Quantification |
| HPR-20 TMS | Transient mass spectrometer for fast event studies |
| HPR-20 EGA | A compact bench-top gas analysis system for evolved gas analysis in TGA-MS |
| SpaciMS | Spatially resolved capillary inlet mass spectrometer |
| TPD Workstation | For UHV temperature programmed desorption studies |
| 3F-PIC / 1000 Series PIC | Transient mass spectrometer for fast event UHV studies |
| HPR-40 DEMS | Solutions for dissolved gas analysis and off-gas analysis in electrochemistry |
Mass spectrometers for thin films, plasma and surface engineering
RGA, plasma ion analysis, surface analysis and SIMS end point detection
| HPR-30 | Process and residual gas analysis |
| EQP Series | Analysis of positive and negative ions, neutrals, and radicals |
| HPR-60 MBMS | Molecular beam sampling mass spectrometer for ion and radical analysis |
| PSM | Plasma sampling mass spectrometer |
| ESPion | Langmuir probe for measurement of plasma properties |
| IMP-EPD | For ion etch control and optimum process quality |
| XBS | MBE deposition flux rate monitor |
| TPD Workstation | For UHV temperature programmed desorption studies |
| SIMS Workstation | UHV SIMS instrument for thin film surface analysis, static SIMS, depth profiling, and imaging |
| Compact SIMS | Compact SIMS instrument optimised for depth profiling at the nanometer scale |
| AutoSIMS | Automatic Surface Analysis System |
| EQS SIMS Analyser | Bolt-on SIMS analyser for the analysis of secondary +ve and -ve ions from solid samples |
| MAXIM | SIMS/SNMS analyser for static and dynamic SIMS and SNMS |
| IG5C | A 5KeV Caesium SIMS primary ion source for UHV surface analysis |
| IG20 | A 5KeV Argon or Oxygen SIMS primary ion source for UHV surface analysis |
Mass spectrometers for residual gas analysis
Analysis of gas and vapour species in vacuum chambers and processes
| RGA Series | For the examination of components present in a vessel or evolved from a process |
| Ion Source Options | A range of electron impact ion sources that can be supplied with any of our RGAs |
| HMT | A dual mode RGA system for vacuum diagnostics and process monitoring |
| HAL 201 RC | A Residual Gas Analyser configured for demanding UHV applications |
| HALO 201 MBE | For molecular beam epitaxy applications |
| HALO | For residual gas analysis |
| 3F-PIC / 1000 Series PIC | Transient mass spectrometer for fast event UHV studies |
| EPIC / EPIC 1000 Series | A system for UHV analysis of neutrals, radicals and ions |
| IDP / IDP 1000 Series | A system for analysis of ions, neutrals and radicals in UHV desorption studies |
| 3F Series 1000 RGA | For high precision scientific and process applications |
| XBS | An MBE deposition flux rate monitor |
| DLS Series | Ultra High Resolution Quadrupole Mass Spectrometer |
| HAL 101X | For tokamak/torus fusion research |
Mass spectrometers for surface analysis
Surface analysis, UHV surface analysis, SIMS & SNMS
| Compact SIMS | Compact SIMS instrument optimised for depth profiling at the nanometer scale |
| AutoSIMS | Automatic Surface Analysis System |
| SIMS Workstation | UHV SIMS instrument for thin film surface analysis, static SIMS, depth profiling, and imaging |
| EQS SIMS Analyser | Bolt-on SIMS analyser for the analysis of secondary +ve and -ve ions from solid samples |
| MAXIM | SIMS/SNMS analyser for static and dynamic SIMS and SNMS |
| IG5C | A 5KeV Caesium SIMS primary ion source for UHV surface analysis |
| IG20 | A 5KeV Argon or Oxygen SIMS primary ion source for UHV surface analysis |
