ESPion
An advanced Langmuir probe for plasma diagnostics
Routine monitoring of the I-V plasma characteristic by the Hiden ESPion probe gives direct information relating to plasma stability and reproducibility. Automatic real-time extrapolation of plasma parameters gives detailed information on plasma properties for use in characterisation and uniformity monitoring.
Applications
- Plasma Potential
- Electron Temperature
- Ion Density
- Electron Density
- Ion Flux
- Electron Energy Distribution Function (EEDF)
Results are achieved employing both the Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) standard plasma analysis models within Hiden’s ESPionsoft automatic analysis software.
The Hiden Z-drive option provides spatially resolved measurements across the plasma volume.
The standard Z-drive translation options are: 300, 600 and 900 mm.
AP-ESPion-202115 – Time resolved plasma diagnostics for pulsed 2.45 GHz hydrogen discharges
AP-ESPion-202111 – HiPIMS deposition of conductive, infrared transparent tin oxide films for high performance electronic applications
AP-ESP-0001 Time resolved Langmuir probe diagnostics for ECR plasma research
AP0067 – O- Density Measurements in the Pulsed-DC Reactive Magnetron Sputtering of Titanium (215 KB)
AP0142 – Ion Density Increase in High Power Twin-cathode Magnetron System (247 KB)
This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with Langmuir probe data.
