ESPion

The ESPion system employs Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard plasma analysis models.

The Hiden automatic Z-drive provides for spatially resolved measurements across the plasma volume. The standard Z-drive translation options are: 300, 600 and 900 mm.

• 15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analyses
• Hiden pioneers in passive RF compensation
• ESPion has the highest blocking impedance of any commercially available unit
• 4.25MOhm at 13.56 MHz cf. 100kOhm
• Gas cooled multi-inductor chain for high temperature plasma operation
• Gas cooled multi-inductor chain is user replaceable for tuning to other frequencies
• Reference probe compensates for low frequency effects
• e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply)
• ESPion the fastest pulsed plasma specifications of any commercial probe
• ESPionSoft contains all necessary gating circuitry as standard
• 300, 600 or 915mm auto linear drive options
• Interlocked isolation valve, 90° probes, combined linear – rotary drives options available
• Self-cleaning cycle to limit probe tip contamination
• ESPionSoft control via RS232, RS485 or Ethernet LAN