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Products for Surface Analysis

Specialising in high-precision surface analysis solutions, Hiden Analytical offers class-leading mass spectrometers and turn-key systems for advanced surface science applications. Here you will find a comprehensive list of our mass spectrometry products for layer structure identification, surface contamination studies, and more.

Compact SIMS

The Hiden Compact SIMS (secondary ion mass spectrometry) has a low form factor and simple, user-friendly layout, with outstanding isotopic sensitivity across the entire periodic table.


A robust surface analysis solution for high throughput operations, the AutoSIMS can perform hundreds of processes a day without operator intervention.

SIMS/SNMS Workstation

The SIMS Workstation combines dynamic and static SIMS analysis with a dual-mode mass spectrometer for positive (+ve) and negative (-ve) ion detection, and an additional secondary neutral mass spectrometry (SNMS) detection mode, for superior flexibility in surface analysis applications.

ToF-qSIMS Workstation

The Hiden TOF-qSIMS system is designed for surface analysis and depth profiling applications of a wide range of materials including polymers, pharmaceuticals, superconductors, semiconductors, alloys, optical and functional coatings and dielectrics, with measurement of trace components to sub-ppm levels.

EQS SIMS Analyser

With high transmission rates and an integrated 45° electrostatic sector energy analyser, the Hiden EQS (electrostatic quadrupole) is our most trusted SIMS detector for surface analysis applications of all scales.


The Hiden MAXIM is a complete quadrupole mass spectrometry system with high transmission optics and a triple mass filter, supporting detailed surface composition mapping at a mass range of up to 1000 atomic mass units (AMU).


The Hiden IG5C is a low power (5keV) caesium ion gun that provides high brightness surface ionisation with a conveniently small mounting flange for superb installation flexibility.


Designed primarily for oxygen compatibility, the Hiden IG20 is a high-performance electron impact ion source with a high current density for an intense spot of just 100 micrometres (µm) in diameter.

Custom SIMS Solutions

The modular nature of Hiden products allows us to efficiently custom design instruments for specific applications and locations. 

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