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Products for Surface Analysis

Specialising in high-precision surface analysis solutions, Hiden Analytical offers class-leading mass spectrometers and turn-key systems for advanced surface science applications. Here you will find a comprehensive list of our mass spectrometry products for layer structure identification, surface contamination studies, and more.

Compact SIMS

The Hiden Compact SIMS (secondary ion mass spectrometry) has a low form factor and simple, user-friendly layout, with outstanding isotopic sensitivity across the entire periodic table.


A robust surface analysis solution for high throughput operations, the AutoSIMS can perform hundreds of processes a day without operator intervention.

SIMS/SNMS Workstation

The SIMS Workstation combines dynamic and static SIMS analysis with a dual-mode mass spectrometer for positive (+ve) and negative (-ve) ion detection, and an additional secondary neutral mass spectrometry (SNMS) detection mode, for superior flexibility in surface analysis applications.

ToF-qSIMS Workstation

The Hiden TOF-qSIMS system is designed for surface analysis and depth profiling applications of a wide range of materials including polymers, pharmaceuticals, superconductors, semiconductors, alloys, optical and functional coatings and dielectrics, with measurement of trace components to sub-ppm levels.

EQS SIMS Analyser

With high transmission rates and an integrated 45° electrostatic sector energy analyser, the Hiden EQS (electrostatic quadrupole) is a versatile positive and negative ion SIMS detector for surface analysis applications at the nanoscale.



The Hiden MAXIM is a complete quadrupole mass spectrometry system with high transmission optics and a triple mass filter, supporting detailed surface composition mapping at a mass range of up to 1000 atomic mass units (AMU).


The IG5C features a low power, high brightness, surface ionization source coupled to a compact ion column, providing high performance in a small package. The IG5C is designed as a primary ion beam for all SIMS applications, dynamic, static and imaging.


Designed primarily for oxygen compatibility, the Hiden IG20 is a high-performance electron impact ion source with a high current density for an intense spot of just 100 micrometres (µm) in diameter.

Modular SIMS

Add high performance SIMS capability to your surface analysis chamber. 


Custom SIMS Solutions

The modular nature of Hiden products allows us to efficiently custom design instruments for specific applications and locations. 


A multi-technique UHV surface science system option providing for XPS, UPS, AES, SAM, ISS and LEIS installed on the Hiden SIMS Workstation.

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