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Products for Surface Analysis

Specialising in high-precision surface analysis solutions, Hiden Analytical offers class-leading mass spectrometers and turn-key systems for advanced surface science applications. Here you will find a comprehensive list of our mass spectrometry products for layer structure identification, surface contamination studies, and more.

Compact SIMS

The Hiden Compact SIMS (secondary ion mass spectrometry) has a low form factor and simple, user-friendly layout, with outstanding isotopic sensitivity across the entire periodic table.


A robust surface analysis solution for high throughput operations, the AutoSIMS can perform hundreds of processes a day without operator intervention.

SIMS/SNMS Workstation

The SIMS Workstation combines dynamic and static SIMS analysis with a dual-mode mass spectrometer for positive (+ve) and negative (-ve) ion detection, and an additional secondary neutral mass spectrometry (SNMS) detection mode, for superior flexibility in surface analysis applications.

ToF-qSIMS Workstation

The Hiden TOF-qSIMS system is designed for surface analysis and depth profiling applications of a wide range of materials including polymers, pharmaceuticals, superconductors, semiconductors, alloys, optical and functional coatings and dielectrics, with measurement of trace components to sub-ppm levels.

EQS SIMS Analyser

With high transmission rates and an integrated 45° electrostatic sector energy analyser, the Hiden EQS (electrostatic quadrupole) is our most trusted SIMS detector for surface analysis applications of all scales.


The Hiden MAXIM is a complete quadrupole mass spectrometry system with high transmission optics and a triple mass filter, supporting detailed surface composition mapping at a mass range of up to 1000 atomic mass units (AMU).


The Hiden IG5C is a low power (5keV) caesium ion gun that provides high brightness surface ionisation with a conveniently small mounting flange for superb installation flexibility.


Designed primarily for oxygen compatibility, the Hiden IG20 is a high-performance electron impact ion source with a high current density for an intense spot of just 100 micrometres (µm) in diameter.

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