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Products for Residual Gas Analysis

RGA Series

Systems for the examination of components present in a vessel or evolved from a process. Measures the concentration of gases and vapours in real time.

Ion Source Options

A range of electron impact ion sources that can be supplied with any of our residual gas analysers. Configures residual gas analysers for specific applications, molecular beam analysis for example.

HMT

A dual mode RGA system for vacuum diagnostics and process monitoring without differential pumping. Measures the residual gases, process contaminates and provides for leak detection.

HAL 201 RC

A Residual Gas Analyser configured for demanding UHV applications. Measures the concentration of gases and vapours in real time.

HALO 201 MBE

A residual gas system configured for molecular beam epitaxy applications. Measures residual gases and provides for contamination and leak detection in MBE systems.

EPIC / EPIC 1000 Series

A system for UHV analysis of neutrals, radicals and ions. Measures the ions, neutrals, and partial pressures in UHV/XHV.

IDP / IDP 1000 Series

A system for analysis of ions, neutrals and radicals in UHV desorption studies. Measures ions and neutrals in electron and photon stimulated desorption.

3F Series / 1000 Series RGA

A system for high precision scientific and process applications. Measures the partial pressures of residual gases with ultra high resolution and extended mass range options to 1000 AMU.

XBS

A system for multiple source monitoring in MBE deposition applications. For molecular beam analysis and deposition rate control.

DLS-1

A system for tokamak/torus fusion research. Measures the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.

DLS-10

Ultra High Resolution Quadruple Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.

DLS-20

Unique Dual-zone Switching Ultra High Resolution Quadruple Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.

HAL 101X

A system for tokamak/torus fusion research with remote analyser mounting up to 80 m. Includes the DLS-1 system TIMS mode for Measurement the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.

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