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HAL 201 RC

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A Residual Gas Analyser configured for demanding UHV applications

The Hiden RGA for UHV are designed and configured for residual gas analysis in demanding UHV applications where critical measurements at UHV are required.



 The HAL 201 RC analyser features vacuum fired ion sources as standard, treated using Hiden’s proprietary vacuum annealing process. The vacuum annealed ion source minimises outgassing, for superior background measurement performance in demanding UHV applications where total pressure is < 5 x 10-10 mbar.

EPICS is the standard instrument control software used in many light sources around the world and the Hiden HAL system is fully compatible with EPICS software drivers.


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Further Reading

The system is supplied with MASsoft Professional software.

This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.

  • automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
  • includes a new tablet view where the background colour changes depending on alarm condition
  • includes a trend view, scan, leak detection and maintenance modes
  • includes alarm function to send alerts to internal I/O, Wi-Fi and by email