Near Atmospheric XPS, APXPS
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Chemical species, gas phase reactions and surface species detected
APXPS – near atmospheric pressure XPS instruments provide for XPS analysis on surfaces at higher pressures, and closer to real world environment than UHV. Hiden’s range of quadrupole mass spectrometers are coupled to the high pressure sample cell for analysis of the gas.
APXPS – near atmospheric pressure XPS instruments provide for XPS analysis on surfaces at higher pressures, and closer to real world environment than UHV. The surface structures may be different when analysed at atmospheric pressure compared to observations made with traditional XPS at UHV. Dynamic effects from gas reactions could be important , and together with the Hiden mass spectrometer system, the results can be directly correlated with the XPS data.
Mass Spectrometers for Thin Films, Plasma & Surface Engineering
Sampling Inlets for Hiden Mass Spectrometers: Gas, Vapour and Liquid Sampling Systems
Mass Spectrometers for Residual Gas Analysis – RGA
High Performance Mass Spectrometers for Vacuum and Semiconductor Process Monitoring
HPR-30 Process Monitoring Mass Spectrometers – Differentially Pumped and High Pressure RGA Systems for Process Monitoring