Residual Gas Analysis
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For routine, fast, wide dynamic range residual gas analysis
Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes.
The Hiden RGA series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements.
Applications include :
- Vacuum chamber leak detection
- Vacuum quality measurement and monitoring
- Virtual leak detection
- Outgassing studies
- Bakeout cycle/vacuum pump down monitoring
Mass Spectrometers for Residual Gas Analysis – RGA
Sampling Inlets for Hiden Mass Spectrometers: Gas, Vapour and Liquid Sampling Systems
High Performance Mass Spectrometers for Vacuum and Semiconductor Process Monitoring
HPR-30 Process Monitoring Mass Spectrometers – Differentially Pumped and High Pressure RGA Systems for Process Monitoring
Mass Spectrometers for Residual Gas Analysis – RGA | For Applications in a Vacuum Environment
HPR-30 Vacuum Process Gas Analyser | A differentially pumped RGA system for vacuum process monitoring
Software for Hiden Mass Spectrometers
RGA Ion Source | Electron Impact Ion Source
Quadrupole Mass Spectrometry Concepts | Mass Spectrometers for Residual Gas Analysis