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EQP Series

For further information and pricing, please get in touch with us.

Systems for Plasma Research

High performance combined mass and energy quadrupole mass spectrometers for the characterisation of plasmas.

EQP-6 300 or 510 amu mass range with 6 mm triple filter quadrupole mass spectrometer for a wide range of plasma research applications.

EQP-9 9 mm triple filter quadrupole-based systems, featuring the broadest range of mass options available.  50 to 5000 amu options for high stability measurements and ion cluster analysis.

EQP-20 featuring Hiden’s 20 mm triple filter quadrupole with zone I/zone H switchable for 20 amu with 0.003 amu peak width, and 200 amu mass range with unit mass resolution for characterisation of hydrogen isotope plasmas.



Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry.

Detailed understanding of the reaction kinetics of plasma ions and neutral species plays a key role in the development of advanced surface engineering processes such as HIPIMS.

The integral electron bombardment ion source provides for analysis of neutrals and, with the addition of the EAMS (electron attachment mass spectrometry) electron attachment mode, for separation and identification of electronegative radical species.

A high transmission 45° sector field energy analyser for positive and negative ion energy analysis up to 1000 eV is included in all of the EQP series instruments.

The EQP Series are available with integrated MCS – multi channel scalar data acquisition with time resolution to 50 nano seconds providing for fast data acquisition in pulsed plasma applications.


Further Reading

Ames Technology Capabilities and Facilities | Plasma Diagnostics

PSI – Paul Scherrer Institut | Plasma & Thin Film Analysis

The system is supplied with MASsoft Professional software.

This Windows 8 and Windows 10 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.