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RGA Series

For further information and pricing, please get in touch with us.

Systems for the examination of components present in a vessel or evolved from a process

All Hiden residual gas analysers are application tested and calibrated to provide the highest quality performance, and they are backed by a 3 year warranty and lifetime service support.



The Hiden RGA Series includes three specification levels :

HALO RGA  – for residual gas analysis
Suitable for vacuum fingerprint analysis, leak detection and trend analysis

3F Series RGA – triple filter mass spectrometers for analytical applications
Triple filter technology provides extended mass ranges, increased mass resolution, enhanced sensitivity and improved contamination resistance for more demanding analytical applications.

3F-PIC – pulse ion counting detection for fast event studies

Ultra-fast pulse ion counting detection provides seven decade continuous dynamic range with optimum sensitivity at UHV/XHV


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Further Reading

Residual Gas Analysis for vacuum quality monitoring at UHV on beam lines and synchrotron rings:BNL Logo

Installation example at Brookhaven National lab
NSLS-II: One of the world’s most advanced synchrotrons

The system is supplied with MASsoft Professional software.

This Windows 8 and Windows 10 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.

  • automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
  • includes a new tablet view where the background colour changes depending on alarm condition
  • includes a trend view, scan, leak detection and maintenance modes
  • includes alarm function to send alerts to internal I/O, Wi-Fi and by email