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RGA Series

For further information and pricing, please get in touch with us.

Systems for the examination of components present in a vessel or evolved from a process

 With partial pressure measurement range from UHV up to 0.01 Pa (10-4 mbar). 

 Sampling systems with differential pumping extend the sampling pressure range for vacuum process monitoring, and gas analysis applications when required.

 All Hiden residual gas analysers are application tested and calibrated to provide the highest quality performance, and they are backed by a 3 year warranty and lifetime service support.




The Hiden RGA Series includes three specification levels :

HALO RGA  – for residual gas analysis
Suitable for vacuum fingerprint analysis, leak detection and trend analysis

3F Series RGA – triple filter mass spectrometers for analytical applications
Triple filter technology provides extended mass ranges, increased mass resolution, enhanced sensitivity and improved contamination resistance for more demanding analytical applications.

3F-PIC – pulse ion counting detection for fast event studies

Ultra-fast pulse ion counting detection provides seven decade continuous dynamic range with optimum sensitivity at UHV/XHV


Related Products

Further Reading

Residual Gas Analysis for vacuum quality monitoring at UHV on beam lines and synchrotron rings:BNL Logo

Installation example at Brookhaven National lab
NSLS-II: One of the world’s most advanced synchrotrons

The system is supplied with MASsoft Professional software.

This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.

  • automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
  • includes a new tablet view where the background colour changes depending on alarm condition
  • includes a trend view, scan, leak detection and maintenance modes
  • includes alarm function to send alerts to internal I/O, Wi-Fi and by email