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A dual mode RGA system for vacuum diagnostics and process monitoring
The Hiden HMT quadrupole mass spectrometer is a unique dual mode RGA system capable of operating at pressures up to 5×10-3 mbar without the need for differential pumping. Operation at this pressure is achieved using a specially designed ion source/quadrupole filter combination and software which corrects for abundance non-linearity. The unique high pressure specification makes the HMT ideal for process monitoring applications.
The HMT is for vacuum process analysis and residual gas analysis, and is vital for process running condition checks, and in process analysis for detecting unexpected contaminants. The HMT system can also operate in RGA mode in the same way as a traditional quadrupole RGA. Dual Faraday / electron multiplier detectors provide partial pressure sensitivities in the 10-13 mbar range. Typical processes that can be monitored include CVD, etching, PECVD and PVD. A process RGA tool for troubleshooting and monitoring.
The system is supplied with MASsoft Professional software.
This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.
The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.
- automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
- includes a new tablet view where the background colour changes depending on alarm condition
- includes a trend view, scan, leak detection and maintenance modes
- includes alarm function to send alerts to internal I/O, Wi-Fi and by email
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