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A system for multiple source monitoring in MBE deposition applications

Molecular beam sources require accurate control for reproducible production quality thin film growth. Hiden’s XBS (cross beam source) system provides in-situ monitoring of multiple sources with real-time signal output for precise control of the deposition. Hiden’s XBS is a great tool used in molecular beam mass spectrometry.


The Hiden XBS RC system is a quadrupole mass spectrometer designed for monitoring multiple beam sources simultaneously, and uniquely offers beam acceptance through a 70° cone, transverse to the quadrupole axis.

 Beam acceptance apertures are configured individually for each specific process chamber source position, manufactured as replaceable plug-in elements to enable retrospective modification in event of chamber alteration.

The high sensitivity and fast data acquisition of the XBS system provide signals for control of growth rates from 0.01 Angstrom per second.


Further Reading

The system is supplied with MASsoft Professional Edition software.

This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.