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Quadrupole Mass Spectrometers for Thin Films and Surface Engineering

For further information and pricing, please get in touch with us.

Plasma characterisation, plasma ion analyzers and langmuir probes

Thin film processing in research, development and functionalisation of surfaces has a broad application range in microelectronics, nanotechnology, solar, flat panel, mechanics, optics, photonics, textiles, coatings, chemistry, biology, and medicine.

Overview

Thin film processing utilises a wide range of techniques, including :

Magnetron sputtering
ALD – atomic layer deposition
CVD – chemical vapour deposition
MOCVD – metal organic chemical vapour deposition
PECVD – plasma enhanced chemical vapour deposition
MBE – molecular beam epitaxial growth
RIE – plasma reactive ion etch
IBE/RIBE – ion beam etch and reactive ion beam etc

Each technique is often tailored for a specific application, requiring special process parameters to produce the surface/film properties required. Hiden mass spectrometers provide critical insight into thin film processing and characterisation enabling optimisation of thin film production and surface quality.

Hiden mass spectrometers are used for process control including SIMS end point detection of ion beam etch of magnetic thin films, III-V layers including gallium arsenide, and superconducting thin films including YBaCuO yttrium barium copper oxide, and for flux monitoring where precise control of film growth in MBE is required.

Residual gas analysers are used for process monitoring and leak detection, offering a unique window into the vacuum processing environment. Analysis of the partial pressures of vacuum residuals including water vapour, hydrocarbons, VOC’s, and air leaks is routine.

The Hiden SIMS Workstation is used for post process analysis of thin films providing depth profiling and fine focus surface imaging of MBE grown thin films, glass coatings, magnetic thin films and metal oxides.

Further Reading

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A comparative study of thick TiSiCN nanocomposite coatings deposited by dcMS and HiPIMS with and without PEMS assistance 2.66 MB 46 downloads

A comparative study of thick TiSiCN nanocomposite coatings deposited by dcMS and...
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Effect of varying N2 pressure on DC arc plasma properties and microstructure of TiAlN coatings 2.37 MB 27 downloads

Effect of varying N2 pressure on DC arc plasma properties and microstructure of...
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Use of an accelerated testing method to characterize inner front pole cover erosion in a high power Hall thruster 5.19 MB 47 downloads

Use of an accelerated testing method to characterize inner front pole cover erosion...
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Time Resolved Langmuir Probe Diagnostics of High Power Pulsed DC Magentron Discharge... 1,018.48 KB 101 downloads

Time resolved Langmuir probe diagnostics of high power pulsed DC magentron discharge...
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Time Resolved Electron Energy Distribution Function in Pulsed Surface Wave Plasma... 3.25 MB 74 downloads

Time resolved electron energy distribution function in pulsed surface wave plasma...
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The Floating Potential of Cylindrical Langmuir Probes 144.64 KB 111 downloads

The floating potential of cylindrical Langmuir probes. ...
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The Distribution of Ion Energies at the Substrate in an Asymmetric Bi-Polar Pulsed DC... 306.90 KB 81 downloads

The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed...
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Hydrogen sorption properties of MgH2–LiBH4 composites. 1.05 MB 56 downloads

Hydrogen sorption properties of MgH2–LiBH4 composites. ...