Experimental and numerical characterization of a radio-frequency plasma source with a DC-grounded electrode configuration using a quarter-wavelength filter

Jan 12, 2022

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Experimental and numerical characterization of a radio-frequency plasma source with a DC-grounded electrode configuration using a quarter-wavelength filter

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Experimental and numerical characterization of a radio-frequency plasma source with a DC-grounded electrode configuration using a quarter-wavelength filter

Experimental and numerical characterization of a radio-frequency plasma source with a DC-grounded electrode configuration using a quarter-wavelength filter

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