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Modular SIMS

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Add high performance SIMS capability to your surface analysis chamber

Hiden’s Modular SIMS system adds SIMS analysis to vacuum chambers via a DN-150-CF flange.

The Modular SIMS is a complete SIMS instrument on a single flange (DN150mm and greater) combining an ion gun, EQS spectrometer, electron gun, light and camera module and retractable sample current monitor.

Applications

Overview

Hiden’s Modular SIMS system adds SIMS analysis to vacuum chambers via a DN-150-CF flange.

The Modular SIMS is a complete SIMS instrument on a single flange (DN150mm and greater) combining an ion gun, EQS spectrometer, electron gun, light and camera module and retractable sample current monitor.

The Modular SIMS is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive and negative ions being assisted by the gas primary ion beam and provides isotopic sensitivity across the entire periodic table.  It is one of our most simple and easy to use SIMS instrument, it has many of the features available on the highest specification instruments, such as nanometre depth resolution.  Making it ideal for the research of thin films, corrosion studies and metallic species.

Features

Related Products

Further Reading

The SIMS Mapper software provides a simple, but powerful, user interface to the SIMS tool.  The species to be analysed are chosen from a period table view, with mass interferences highlighted, and the data are collected as images throughout the analysis.  For depth profiles the gated area can be defined after analysis and images may be stacked to reconstruct the concentration profile in three dimensions.  For less experienced operators, or in a production environment, analyses can be run from previously stored templates and fully automated “queued” running is possible with the automatic stage option.  A range of data export formats allows results to be used by other software packages for enhanced display or processing.

  • 3D imaging
  • depth profiling with highly flexible gating
  • simple choice of species
  • easy set-up for inexperienced users yet full control for experts
  • large live interactive image and depth profile windows
  • export in .csv and proprietary formats