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A system for the analysis of secondary positive and negative ions from solid samples

Hiden Analytical supplies world-class mass spectrometry solutions and innovative tools for ion analyses, including the tried-and-trusted Hiden EQS. This high transmission electrostatic quadrupole secondary ion mass spectrometer (SIMS) is one of our most popular detection systems for research-scale thin film nanoscale surface analysis, as well as production-grade surface engineering.



The Hiden EQS is a unique electrostatic quadrupole SIMS detector, specialised for the mass spectral analysis of both positive (+ve) and negative (-ve) secondary ions from solid samples. With its integrated 45° electrostatic sector ion energy analyser, the Hiden EQS can simultaneously analyse ion energy with a resolution of 0.2 electron volts (eV). This makes it one of the most versatile tools for ion analyses in a raft of mass spectrometry applications, including:

  • Dynamic and static SIMS
  • Focussed ion beam (FIB) mass spectrometry
  • Secondary neutral mass spectrometry (SNMS)
  • Sputter depth profiling
  • Sputtered ion and neutral mass/energy analysis

Tools for Ion Analysis from Hiden Analytical

A popular bolt-on fitting for after-market systems, the Hiden EQS offers high sensitivity and optional differential pumping to meet the imaging, depth profiling, and mass spectra requirements of users in a range of markets.

If you need more information about integrating our electrostatic quadrupole SIMS tool into your existing mass spectrometry system or require a ground-up solution for your ion analyses, simply contact a member of the Hiden Analytical team today.


Related Products

Further Reading

The system is supplied with MASsoft Professional software.

This Windows 8 and Windows 10 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.