Products

Mass spectrometers for gas analysis

Real time gas analysers that address the broadest application range

QGA Quantitative gas analyser
HPR-20 R&D Specialist gas analysis system for advanced research
HPR-20 EGA Gas analysis system for evolved gas analysis in TGA-MS
TGA-MS Mass spectrometer inlets for connecting/coupling to TGA systems
QIC Series Inlets Hiden offer a variety of inlet options for the QIC Series gas analysis systems
HPR-20 TMS Transient mass spectrometer for fast event gas analysis
QIC Biostream Multi-stream gas/vapour analyser for fermentation off-gas analysis
QIC Multistream Integrated MS and selector valve for multi-component, multi-stream gas analysis
HPR-40 DSA Membrane inlet mass spectrometer for dissolved species analysis
HPR-40 DEMS Cells Solutions for dissolved gas analysis and off-gas analysis in electrochemistry
HPR-60 MBMS Molecular beam sampling mass spectrometer for ion and radical analysis
HPR-70 Batch inlet gas analysis system for discrete low volume sample analysis
HPR-90 Automated package cracking analysis system for light bulb gas analysis
Compact Gas Analysers For less demanding applications

Mass spectrometers for catalysis and thermal analysis

Automated micro reactors and mass spectrometers for catalyst researchers

CATLAB-PCS Automated microreactor/mass spectrometer system
CATLAB-FB Horizontal Furnace/MS System for Catalyst Core Quantification
SpaciMS Spatially resolved capillary inlet mass spectrometer
TPD Workstation For UHV temperature programmed desorption studies
HPR-20 TMS Transient mass spectrometer for fast event studies
TGA-MS Mass spectrometer inlets for connecting/coupling to TGA systems
3F-PIC Transient mass spectrometer for fast event UHV studies
HPR-60 MBMS Molecular beam sampling mass spectrometer for ion and radical analysis

Mass spectrometers for thin films, plasma and surface engineering

RGA, plasma ion analysis, surface analysis and SIMS end point detection

HPR-30 Process and residual gas analysis
EQP Analysis of positive and negative ions, neutrals, and radicals
HPR-60 MBMS Molecular beam sampling mass spectrometer for ion and radical analysis
PSM Plasma sampling mass spectrometer
ESPion Langmuir probe for measurement of plasma properties
IMP-EPD For ion etch control and optimum process quality
XBS MBE deposition flux rate monitor
TPD Workstation For UHV temperature programmed desorption studies
SIMS Workstation UHV SIMS instrument for thin film surface analysis, static SIMS, depth profiling, and imaging
Compact SIMS Compact SIMS instrument optimised for depth profiling at the nanometer scale
AutoSIMS Automatic Surface Analysis System
EQS SIMS Analyser Bolt-on SIMS analyser for the analysis of secondary +ve and -ve ions from solid samples
MAXIM SIMS/SNMS analyser for static and dynamic SIMS and SNMS
IG5C A 5KeV Caesium SIMS primary ion source for UHV surface analysis
IG20 A 5KeV Argon or Oxygen SIMS primary ion source for UHV surface analysis

Mass spectrometers for residual gas analysis

Analysis of gas and vapour species in vacuum chambers and processes

RGA Series For the examination of components present in a vessel or evolved from a process
Ion Source Options A range of electron impact ion sources that can be supplied with any of our RGAs
HMT A dual mode RGA system for vacuum diagnostics and process monitoring
HAL 201 RC A Residual Gas Analyser configured for demanding UHV applications
HALO 201 MBE For molecular beam epitaxy applications
XBS An MBE deposition flux rate monitor
qRGA For tokamak/torus fusion research
3F Series 1000 RGA For high precision scientific and process applications
DLS-20 Ultra High Resolution Quadrupole Mass Spectrometer
3F-PIC Transient mass spectrometer for fast event UHV studies
EPIC A system for UHV analysis of neutrals, radicals and ions
IDP A system for analysis of ions, neutrals and radicals in UHV desorption studies

Mass spectrometers for surface analysis

Surface analysis, UHV surface analysis, SIMS & SNMS

AutoSIMS Automatic Surface Analysis System
SIMS Workstation UHV SIMS instrument for thin film surface analysis, static SIMS, depth profiling, and imaging
Compact SIMS Compact SIMS instrument optimised for depth profiling at the nanometer scale
EQS SIMS Analyser Bolt-on SIMS analyser for the analysis of secondary +ve and -ve ions from solid samples
MAXIM SIMS/SNMS analyser for static and dynamic SIMS and SNMS
IG5C A 5KeV Caesium SIMS primary ion source for UHV surface analysis
IG20 A 5KeV Argon or Oxygen SIMS primary ion source for UHV surface analysis