Quadrupole mass spectrometers for advanced surface science, gas analysis, RGA and plasma characterization from Hiden Analytical

Hiden Analytical is a leading manufacturer of quadrupole mass spectrometers for both research and for process engineering. The product range includes:

For ultra-high vacuum research:

 Triple filter quadrupole mass spectrometers including:

• 3F series RGA systems
• PIC series with fast, high-sensitivity pulse ion counting detection
• EPIC series with pulse ion counting detection and pole bias control for positive and negative ion analysis
• MAXIM and EQS SIMS probes
• IG-20 gas and IGC-5 caesium ion guns

For ultra-high vacuum through to sub-atmospheric process applications:

• HAL multifunction RGA Series
• HMT high pressure RGA process monitor
• HPR-30 differentially pumped system for operation to 5 mbar
• HPR-50 CVD diamond process analyzer
• HPR-80 quantitative vacuum process gas analyser for reactive/corrosive species
• XBS flux rate control monitor for MBE
• IMP end-point detectors for ion-beam etch and reactive ion-beam etch end point control
• EQP and PSM plasma ion mass / energy analysers for plasma characterisation.

Laboratory gas analyzers

• QIC-20 laboratory style gas/vapour analyzers
• Hydra multi-stream  gas/vapor analyzer
• HPR-70 batch gas inlet system for analysis of discrete gas samples.
• HPR-90 sealed package gas analyzer with integral package cracker

Research-grade gas analysers

• HPR 20 QIC Plus system with integrated calibration gas generation- Gas Analayzer.
• HPR-40 dissolved species analyzer- Membrane inlet mass spectrometer - MIMS.
• HPR-60 molecular beam sampling mass spectrometer for atmospheric plasma analysis and gas reaction kinetics studies- MBMS.
• CATLAB integrated gas analyzer and microreactor for Catalyst Characterisation.

UHV Surface Analysis - SIMS Secondary Ion Mass Spectrometry

• SIMS Workstation - A complete UHV surface analysis system.
• MAXIM and EQS SIMS probes
• IDP Quadrupole mass spectrometer for electron and photon stimulated desorption
• IG-20 gas and IGC-5 caesium ion guns
• IFG 200 Ion FAB gun

Catalyst Characterization - Thermal Analysis TA-MS

• CATLAB integrated gas analyzer and microreactor for Catalyst Characterisation.
• SPACI-MS 3D Catalyst Characterisation system
• HPR 20 QIC -EGA Evolved gas analyser for TGA-MS and TA -MS.

Plasma diagnostics and characterization - Ions - Neutrals -Radicals

• EQP  plasma ion mass / energy analyser for plasma characterisation.
• PSM Plasma ion analyser
• ESPion Advanced Langmuir Probe
• ICP Plasma Reactor with integrated plasma diagnostics