Scientific Instrument and Equipment Design, Development

and Manufacturing from Hiden Analytical

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A range of gas analysis systems: stable, sensitive and responsive for real-time analysis of multiple gas and vapour species with dynamic range from ppb to 100 %. Hiden Analytical have been designing and developing the highest quality quadrupole mass spectrometer based gas analysis systems for 30 years. Read more...

2nd International Advances in Applied Physics & Materials Science Congress

Antalya, Turkey

April 2012

Read more...

Press Release Image
With over 30 years experience in the field, Hiden Analytical continues to remain dedicated to producing mass spectrometer-based gas analysis systems. The latest product catalogue, just released, highlights the full range of application-specific standard systems. Read more...

View descriptions of our product ranges in a variety of languages and request more information from a local representative. Read more...

Hiden Isochema is a world leader in the design and manufacture of sorption instruments for research, development and production applications in surface chemistry and materials science. Read more...

Product Overview: from Surface Science to Quadrupole Mass Spectrometers

Hiden Analytical is a leading manufacturer of quadrupole mass spectrometers for gas analysis, plasma characterisation and both research and for process engineering and surface science. The product range includes:

For ultra-high vacuum research:

Triple filter quadrupole mass spectrometers including:

  • 3F series RGA systems
  • PIC series with fast, high-sensitivity pulse ion counting detection
  • EPIC series with pulse ion counting detection and pole bias control for positive and negative ion analysis
  • MAXIM, a secondary ion mass spectrometer for UHV surface analysis and SNMS
  • EQS SIMS probe, secondary ion mass spectrometer bolt on SIMS analyser
  • IG20 ion gun
  • IG5C caesium ion gun

For ultra-high vacuum through to sub-atmospheric process applications:

  • HAL multifunction RGA Series
  • HMT high pressure RGA process monitor
  • HPR 30 differentially pumped system for operation to 5 mbar
  • HPR 50 CVD diamond process analyser
  • HPR 80 quantitative vacuum process gas analyser for reactive/corrosive species
  • XBS flux rate control monitor for MBE
  • IMP end-point detectors for ion-beam etch and reactive ion-beam etch end point control
  • PSM plasma ion mass and energy analyser for plasma characterisation
  • EQP plasma ion mass and energy analyser for plasma characterisation

Laboratory gas analysers:

  • QIC Series laboratory style gas/vapour analysers
  • QIC Biostream, hydra multi-stream gas/vapour analyser
  • HPR 70 batch gas inlet system for gas analysis of discrete samples
  • HPR 90 sealed package gas analyser with integral package cracker

Research-grade gas analysers:

  • HPR 20 QIC Plus system with integrated calibration gas generation - gas analyser
  • HPR 40 dissolved species analyser - membrane inlet mass spectrometer - MIMS
  • HPR 60 molecular beam sampling mass spectrometer for atmospheric plasma analysis, gas analysis and gas reaction kinetics studies - MBMS
  • CATLAB integrated gas analyser and microreactor for catalyst characterisation

UHV surface analysis:

- SIMS secondary ion mass spectrometer
- UHV temperature programmed desorption analysis system

  • SIMS Workstation - A complete UHV surface analysis system
  • MAXIM, a secondary ion mass spectrometer for UHV surface analysis and SNMS
  • EQS SIMS probe, secondary ion mass spectrometer bolt on SIMS analyser
  • IDP quadrupole mass spectrometer for electron and photon stimulated desorption
  • IG20 ion gun
  • IG5C caesium ion gun
  • IFG200 FAB fast atom bombardment ion gun
  • TPD Workstation - A system for UHV temperature programmed desorption

Catalyst Characterisation - Thermal Analysis TA-MS:

  • CATLAB integrated gas analyser and microreactor for catalyst characterisation
  • SPACI MS 3D catalyst characterisation system
  • HPR 20 QIC R&D - A specialist gas analysis system for advanced research
  • HPR 20 QIC TNS - A specialist gas analysis system for fast event transient analysis
  • HPR 20 QIC EGA - A gas analysis system for evolved gas analysis

Plasma diagnostics and plasma characterisation - Ions - Neutrals - Radicals:

  • EQP plasma ion mass and energy analyser for plasma characterisation
  • PSM plasma ion mass and energy analyser for plasma characterisation
  • ESPion advanced langmuir probe for plasma diagnostics
  • ICP plasma reactor with integrated plasma diagnostics
.