Time-resolved ion flux measurements in pulsed electron-beam-generated plasmas.
Pulsed DC operation of a Penning-type opposed target magnetron.
Pressure and input power dependence of Ar/N2H2 inductively coupled plasma systems.
Positive sheath behaviour in low pressure Argon plasma.
Plasma implanted ultra shallow junction boron depth profiles: Effect of plasma chemistry and sheath conditions.
Plasma diagnostics in large area plasma processing system
Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed DC magentron discharges.
On the extraction of positive & negative ions from electron-beam-generated plasmas.
Mass-resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen.