Time resolved Langmuir probe diagnostics of high power pulsed DC magentron discharge plasmas.
Time resolved electron energy distribution function in pulsed surface wave plasma generated by a ring-slot antenna.
The floating potential of cylindrical Langmuir probes.
The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge.
Selective etching of (Ba,Sr)TiO3 thin films over silicon in an inductively coupled plasma.
Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir probe diagnoses.
Observations of the long-term plasma evolution in a pulsed dc magnetron discharge.
Langmuir probe measurements in an inductively coupled plasma source.
Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges.