RGA / Vacuum processing Archives - Page 2 of 8

Hydrogen recycling in CVD processes using electrochemical hydrogen compression

by Hattie Payne | Sep 15, 2025

Hydrogen recycling in CVD processes using electrochemical hydrogen compression

by Hattie Payne | Sep 12, 2025

Hydrogen recycling in CVD processes using electrochemical hydrogen compression

Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

by Caroline Wardropper | Mar 10, 2025

Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

Surface chemistry in Atomic Layer Deposition of Gallium Nitride from Triethylgallium and Ammonia studied by mass spectroscopy

by Caroline Wardropper | Feb 7, 2025

Surface chemistry in Atomic Layer Deposition of Gallium Nitride from Triethylgallium and Ammonia studied by mass spectroscopy

Plasma Decomposition of Ferrocene

by Caroline Wardropper | Feb 7, 2025

Plasma Decomposition of Ferrocene

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Hydrogen recycling in CVD processes using electrochemical hydrogen compression

Hydrogen recycling in CVD processes using electrochemical hydrogen compression

Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates

Surface chemistry in Atomic Layer Deposition of Gallium Nitride from Triethylgallium and Ammonia studied by mass spectroscopy

Plasma Decomposition of Ferrocene

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