Optimization of photoacid generator in CA resist for EUVL.
Investigation of the shape of the R(0) absorption line in v3, N2O recorded from an axisymmetric supersonic free jet expansion.
Fragment anion spectroscopy of water in the inner and outer valence regions.
Residual Gas Analyzers (RGAs) have been widely used in accelerator vacuum systems for monitoring and vacuum diagnostics. The National Synchrotron Light Source II (NSLS-II) vacuum system adopts Hiden RC-100 RGA which supports remote electronics, thus allowing real-time diagnostics with beam operation as well as data archiving and off-line analysis. This paper describes the interface and operation of these RGAs with the EPICS based control system.
Dry vacuum pumps: A method for the evaluation of the degree of dry.
40Ar/39Ar geochronology using a quadrupole mass spectrometer