The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured on the stainless steel walls of the differential pumping systems of a plasma reactor. This measurement is made by comparing the beam to background signal ratio of the radicals measured by...
In discharge dentrification, radical production by electron collision with combustion gas is a key process which determines the dentrification process and its performance. In this study N, O, OH and H radical densities have been measured by appearance mass...
A radical beam source for methyl radicals (CH3) was characterized applying ionization-threshold mass spectrometry. The beam source is based on thermal dissociation of methane (CH4) or azomethane (N2~CH3!2! in a heated tungsten capillary. A flux of (361)31013 cm22 s21...
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