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Ion chemistry and ionic thin film deposition from HMDS‐photochemistry induced by VUV‐radiation from an atmospheric plasmaPlasma Processes Polymers – 2024 – Winzer – Ion chemistry and ionic thin film deposition from HMDS‐photochemistry i
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Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects