A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X = W, C, Al, and Si)

Jun 20, 2023

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A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X = W, C, Al, and Si)

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A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X = W, C, Al, and Si)

A comparison of plasma generation, plasma transport, and film formation for a DC vacuum arc source with Ti–X compound cathodes (X = W, C, Al, and Si)

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