Application of Mass Resolved Ion Scattering, Secondary Ion Mass Spectrometry and Sample-Current Measurements for In Situ Depth Profiling of Thin Films.

by hiden | Aug 25, 2016

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Application of Mass Resolved Ion Scattering, Secondary Ion Mass Spectrometry and Sample-Current Measurements for In Situ Depth Profiling of Thin Films.

Application of Mass Resolved Ion Scattering, Secondary Ion Mass Spectrometry and Sample-Current Measurements for In Situ Depth Profiling of Thin Films.