Bolt-on SIMS Analyser for FIB Microscopes providing Chemical Composition Analysis


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Create Date4th October 2016
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Hiden SIMS bolt-on mass spectrometers and ion guns enable a complete SIMS facility to be added to diverse analytical UHV surface analysis facilities, and the latest Hiden EQS probe now offers the inclusion of an integrated SNMS mode to provide the dual roles of sputtered neutral and secondary ion mass spectrometry. The dual techniques are beneficial for the measurement of optical and metallurgical coatings, alloys, corrosion layers and architectural coatings for example, enabling direct quantification of concentration over the full range from trace level to 100%.