Customer Research Review Issue 1120/09 Thin Films, Plasma and Surface Engineering

In this issue :

Customer Research

Absolute Quantification of Deuterium Ion Fluxes. Project Summary by: A .Manhard, T. Schwarz-Selinger, and W. Jacob Max-Planck-Institute für Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany

Ti and Al ion irradiation during Ti1-xAlxN alloy film growth. Project Summary by: G. Greczynski Department of Physics (IFM), Linköping University, SE-581 83 Linköping, Sweden

Negative oxygen ion impingement on SiO2 thin films during growth. Project Summary by: A. Palmero Instituto de Ciencia de Materiales de Sevilla (CSIC/US), Avda. Américo Vespucio 49, 41092 Seville, Spain

The origin of oxygen in oxide thin films. Project Summary by: Dr. Christof W. Schneider Paul Scherrer Institut, Materials Group, OFLBU111, General Energy Research Department, CH-5232 Villigen PSI, Switzerland

Decomposition of Lignin from Sugarcane Bagasse. Project Summary by: J. Amorim Laboratório Nacional de Ciência e Tecnologia do Bioetanol CTBE/CNPEM, 13083-970, Campinas, São Paulo, Brazil

Products Referenced in this Issue

EQP – Plasma Sampling Mass Spectrometer. The Hiden EQP is a combined mass / energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes : Analysis of positive ions, negative ions, neutral radicals and neutrals, Etching / Deposition Studies, Ion Implantation / Laser Ablation, Residual Gas Analysis / Leak Detection, Plasma electrode coupling – follow electrode conditions during operation, Analysis through a viewport, grounded electrode, driven electrode.

PSM – Plasma Ion Analyser. The Hiden PSM is a differentially pumped mass spectrometer for the analysis of secondary ions and neutrals from plasma process: Reactive Ion Etching – End Point Detection, Plasma Deposition Studies, Ion Implantation/Laser Ablation, Residual Gas Analysis, Leak Detection.

EQS – Bolt on SIMS Analyser. The EQS is a secondary ion mass spectrometer bolt on SIMS analyser for the analysis of secondary positive and negative ions from solid samples: Static/Dynamic SIMS with Energy Analysis, Integral Front End Ioniser for RGA, Composition/Contamination Analysis, Depth Profiling, Leak Detection & Desorbed Gas Analysis, Compatible with Hiden SIMS Workstation, Suitable for FIB-SIMS Integration.

HPR-60 – Molecular Beam Mass Spectrometer. The Hiden HPR-60 Molecular Beam Sampling Mass Spectrometer is a compact gas analysis system for analysis of neutrals, radicals and ions: Reaction Kinetics, Plasma Diagnostics, Combustion Studies – Flame Ionisation Analysis, Catalysis Studies, CVD/MOCVD – Diamond Growth Studies, Flash Desorption Studies, Atmospheric Glow Discharge Analysis, Cluster Analysis.

In the Press

Compact SIMS A design breakthrough for surface analysis. The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis…