Customer Research Review Issue 1120/11 Mass Spectrometers for Plasma Characterisation

In this issue :

Customer Research

Nanoparticle decoration of carbon nanotubes by sputtering. Project Summary by: Christopher Muratore, University of Dayton

CF_x films synthesized by HIPIMS sputtering of carbon. Project Summary by: Dr. Susann Schmidt, Linköping University

Investigation of Solar Energy Materials. Project Summary by: D. M. Meysing, Colorado School of Mines

CH₂F₊ and CHF₂ ion density measurements in argon or krypton-diluted CH₂F₂ plasmas. Project Summary by: Yusuke Kondo, Kenji Ishikawa, Toshiya Hayashi, and Masaru Hori, Nagoya University

Time resolved Langmuir probe diagnostics for ECR plasma
research. Project Summary by: O.D. Cortázar, ESS Bilbao Consortium

Products Referenced in this Issue

EQP – Plasma Sampling Mass Spectrometer. The Hiden EQP is a combined mass/energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes: Analysis of positive ions, negative ions, neutral radicals and neutrals, Etching/Deposition Studies, Ion Implantation/Laser Ablation, Residual Gas Analysis/Leak Detection, Plasma electrode coupling – follow electrode conditions, during operation
Analysis through a viewport, grounded electrode, driven electrode

ESPion – for Measurement of Plasma Properties. The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia: Etching / Deposition / Cleaning Plasma Processes, Pulsed plasma operation, Ion density (Ni & Gi), Electron retardation (Te & EEDF), Electron density (Ne), Plasma Potential, Debye Length, floating potential, Ion flux

HPR-60 MBMS – Molecular Beam Mass Spectrometer. The Hiden HPR-60 Molecular Beam Sampling Mass Spectrometer is a compact gas analysis
system for analysis of neutrals, radicals and ions: Reaction Kinetics, Plasma Diagnostics, Combustion Studies – Flame Ionisation Analysis, Catalysis Studies,
CVD/MOCVD – Diamond Growth Studies, Flash Desorption Studies, Atmospheric Glow Discharge Analysis, Cluster Analysis

In the Press

Mass spectrometric measurement of plasma and flame chemistry. The mass spectrometric analysis of the ionised and chemically unstable reactive species generated in flame and high-pressure plasma environments requires their rapid transit through vacuum through to the mass spectrometer with minimal interaction.