Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices

May 7, 2024

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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices

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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices

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