fbpx
Select Page

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS

Jul 7, 2023

[featured_image]
Download
Download is available until [expire_date]
  • Version
  • Download 9
  • File Size 10.49 MB
  • File Count 1
  • Create Date July 7, 2023
  • Last Updated July 7, 2023

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS