Ion Energy Distributions and Optical Emission Spectra in NF3-Based Process Chamber…

Oct 2, 2016

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Ion Energy Distributions and Optical Emission Spectra in NF3-Based Process Chamber...

Ion energy distributions and optical emission spectra in NF3-based process chamber cleaning plasmas.

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Ion Energy Distributions and Optical Emission Spectra in NF3-Based Process Chamber…

Ion Energy Distributions and Optical Emission Spectra in NF3-Based Process Chamber...

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