Ion-Enhanced Chemical Etching of HfO2 for Integration in Metal–Oxide–Semiconductor Field…

Oct 2, 2016

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Ion-Enhanced Chemical Etching of HfO2 for Integration in Metal–Oxide–Semiconductor Field...

Ion-enhanced chemical etching of HfO₂ for integration in metal–oxide–semiconductor field effect transistors.

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Ion-Enhanced Chemical Etching of HfO2 for Integration in Metal–Oxide–Semiconductor Field…

Ion-Enhanced Chemical Etching of HfO2 for Integration in Metal–Oxide–Semiconductor Field...

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