Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas.

Oct 2, 2016

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Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas.

Mass spectrometry studies of resist trimming processes in HBr/O₂ and Cl₂/O₂chemistries.

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Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas.

Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas.

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