fbpx
Select Page
[featured_image]
Download
Download is available until [expire_date]
  • Version
  • Download 45
  • File Size 201.40 KB
  • File Count 1
  • Create Date October 2, 2016
  • Last Updated October 2, 2016

Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas

Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas.