Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas

Oct 2, 2016

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Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas

Magnetized inductively coupled plasma etching of GaN in Cl₂/BCl₃ plasmas.

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Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas

Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas

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