Mass Spectrometric Studies of Plasmas used for Surface Treatment

Oct 2, 2016

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Mass Spectrometric Studies of Plasmas used for Surface Treatment

Mass-resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency Plasmas in Argon and Nitrogen.

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Mass Spectrometric Studies of Plasmas used for Surface Treatment

Mass Spectrometric Studies of Plasmas used for Surface Treatment

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