Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4 F8 /O2 dual-frequency capacitively coupled plasma

Oct 4, 2023

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Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4 F8 /O2 dual-frequency capacitively coupled plasma

Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4 F8/O2 dual-frequency capacitively coupled plasma

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Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4 F8 /O2 dual-frequency capacitively coupled plasma

Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4 F8 /O2 dual-frequency capacitively coupled plasma

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