Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy…

Oct 2, 2016

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Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy...

Measurements of neutral and ion composition, neutral temperature, and electron energy distribution function in a CF4 inductively coupled plasma.

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Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy…

Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy...

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