Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries

Oct 2, 2016

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Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries

Plasma etching of high dielectric constant materials on silicon in halogen chemistries.

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Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries

Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries

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