Residual gas analysers for UHV/XHV in-vacuum operation

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Create Date11th May 2017

The Hiden RGA series of quadrupole mass spectrometers for in-vacuum process analysis is further extended to include systems for applications from general vacuum monitoring through to specialised environmental and R&D applications.

The Hiden HAL/3F series with triple-stage mass filter enhance both absolute sensitivity and mass resolution, with abundance sensitivity extended to just 5 parts-per-billion(ppb) as determined by measurement of atmospheric Xenon in air. An optional version with fast digital detection – the HAL PIC series – provides fastest response together with a continuous 7-decade dynamic range and minimum detectable partial pressure of just 10E-15 millibar.